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2012 - 11th Annual NC State Summer Undergraduate Research Symposium
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Session Time :
8/1/12 3:00 PM - 8/1/12 4:14 PM
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Content Area : OIA-SRE, Office of International Affairs - Summer Research Experience
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Lead Student Presenters : Motao Cao
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Abstract Title : Growth of TiO2 Epitaxial Film
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Abstract :
The growth of TiO2 epitaxial film is important for both the development of epitaxy theory and the application in semiconductor devices, because epitaxy is the only affordable method of high quality crystal growth for many semiconductor materials. In my project, pulsed laser deposition technique is employed to grow rutile TiO2 epitaxial thin films on r-, c- and m- sapphire substrates. The formation of the rutile TiO2 epitaxial thin films, growth characteristics, and defect content as a function of laser and substrate variables are studied. 2θscan XRD revealed formation of highly textured rutile films with out-of-plane orientations of [100] and [001] on c- and m- sapphire substrates, respectively. The epitaxial relationships across the film/substrate interface is determined using Φ-scan XRD. The results are further confirmed by TEM diffraction and imaging. The atomic arrangement at the interfaces is explained based on the domain matching paradigm, where integral multiples of planes match across the film-substrate interface.
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Mentor and/or Co-Author : Jay Narayan
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